Spectroscopic Investigations of Plasma Nitriding and Nitrocarburizing Processes Using an Active Screen: A Comparative Plasma Chemical Study of Two Reactor Types
Spectroscopic Investigations of Plasma Nitriding and Nitrocarburizing Processes Using an Active Screen: A Comparative Plasma Chemical Study of Two Reactor Types
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使用活性屏幕对等离子渗氮和氮碳共渗过程进行光谱研究：两种反应器类型的比较等离子化学研究
DOI：
10.1002/ctpp.201510019
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发表时间：
2015
影响因子：
1.6
通讯作者：
Röpcke
中科院分区：
文献类型：
--
作者：
Hamann;Börner;Burlacov;Röpcke
在两种不同类型的反应器中进行了低压脉冲直流N2-H2等离子体与CH 4混合物的比较研究，（i）圆柱形工业规模的活性屏等离子体氮化（ASPN）反应器和（ii）实验室规模的等离子体氮化监测反应器（PLANIMOR）与线性电极配置。应用红外激光吸收光谱（IRLAS）的四个稳定的分子，CH 4，HCN，NH 3，和C2 H2的分子浓度的演变进行了监测。含碳前体CH 4的解离度在80和95%之间变化。分子反应产物的浓度范围为1011 ~ 1016分子cm-3。通过分析在屏等离子体功率、气体混合物和CH 4混合物的变化下分子浓度的发展，发现在以NH3和HCN为主要等离子体转化产物的两个反应器中，监测物种的行为取决于不同的参数。甲烷裂解效率随屏等离子体功率的增加而从2.4 × 10 ~（15）J ~（-1）下降到0.8 × 10 ~（15）J ~（-1）。利用光学发射光谱（OES）测量了等离子体中N+2离子的旋转温度，其范围为650...920 K，ASPN反应器中屏等离子体的旋转温度比PLANIMOR反应器中屏等离子体的旋转温度高约100 K。同样，随着功率的增加，氮分子的离子成分，即第一负系统的N+2-（0 - 0）带的强度，其已被用作比较两个反应器的参考参数，相对于由第二正系统的N2-（0 - 0）带表示的中性成分的强度强烈增加。此外，钢样品已经在ASPN反应器和PLANIMOR中进行了处理，从而获得了相当的氮化结果。（© 2015 WILEY‐VCH Verlag GmbH & Co. KGaA，魏因海姆）
Low‐pressure pulsed DC N2‐H2plasmas with admixtures of CH4were investigated in a comparative study in two different types of reactors, (i) a cylindrical industrial scale active screen plasma nitriding (ASPN) reactor and (ii) a laboratory scale plasma nitriding monitoring reactor (PLANIMOR) with a linear electrode configuration. Applying infrared laser absorption spectroscopy (IRLAS) the evolution of the molecular concentrations of four stable molecules, CH4, HCN, NH3, and C2H2has been monitored. The degree of dissociation of the carbon containing precursor, CH4, varied between 80 and 95%. The concentrations of the molecular reaction products have been found in a range of 1011to 1016molecules cm–3. By analyzing the development of the molecular concentrations at changes of the screen plasma power, the gas mixture and the admixture of CH4, a similar behavior of the monitored species depending on the varied parameters has been found in both reactors with NH3and HCN as the main products of plasma conversion. The fragmentation efficiency of methane has been determined, decreasing from 2.4 to 0.8 × 1015molecules J–1with the increasing power of the screen plasmas in both reactors. With the help of optical emission spectroscopy (OES) the rotational temperature of the N+2ions in the plasma could be determined, being in a range of 650…920 K where the rotational temperature of the screen plasma in the ASPN reactor is approximately 100 K higher than that in PLANIMOR. Also with power the ionic component of nitrogen molecules, i.e. the intensity of the N+2‐(0‐0) band of the first negative system, which has been used as the reference parameter for comparing both reactors, increases strongly in relation to the intensity of the neutral component, represented by the N2‐(0‐0) band of the second positive system. In addition, steel samples have been treated in both the ASPN reactor and PLANIMOR leading to comparable nitriding results. (© 2015 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)
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DOI：
10.1179/1749514814z.000000000104
发表时间：
2014
期刊：
International Heat Treatment & Surface Engineering
影响因子：
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作者：
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DOI：
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DOI：
--
发表时间：
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期刊：
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