Stack growth of wafer-scale van der Waals superconductor heterostructures
Stack growth of wafer-scale van der Waals superconductor heterostructures
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DOI：
10.1038/s41586-023-06404-x
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发表时间：
2023-09
期刊：
影响因子：
64.8
通讯作者：
Zhenjia Zhou;Fuchen Hou;Xianlei Huang;G. Wang;Zihao Fu;Weilin Liu;Guowen Yuan;Xiaoxiang Xi
中科院分区：
文献类型：
--
作者：
Zhenjia Zhou;Fuchen Hou;Xianlei Huang;G. Wang;Zihao Fu;Weilin Liu;Guowen Yuan;Xiaoxiang Xi
二维（2D）货车德瓦耳斯（vdW）异质结构近年来引起了人们的广泛关注。最广泛使用的制造方法是将机械剥离的微米尺寸的薄片堆叠，但该方法对于实际应用而言不可扩展。尽管有成千上万的2D材料被创造出来，使用各种堆叠组合，-，-，几乎没有任何大的2D超导体可以完整地堆叠成vdW异质结构，极大地限制了这种器件的应用。在这里，我们报告了一个高到低的温度策略，可控地生长堆叠的多层VDW超导异质结构（VDWSH）薄膜在晶圆级。在vdWSH中的2D超导体的层数可以精确控制，并且我们已经成功地生长了27个双块，15个三块，5个四块和3个五块vdWSH薄膜（其中一个块代表一种2D材料）。形态学，光谱和原子尺度的结构分析揭示了大规模的平行，干净和原子级尖锐的vdW界面的存在，相邻层之间的污染非常少。完整的vdW接口，使我们能够实现接近诱导超导和超导约瑟夫森结在厘米级。我们制作多层vdWSH的过程可以很容易地推广到涉及2D材料的其他情况，从而可能加速下一代功能器件和应用的设计。
Two-dimensional (2D) van der Waals (vdW) heterostructures have attracted considerable attention in recent years, , , –. The most widely used method of fabrication is to stack mechanically exfoliated micrometre-sized flakes, , , , , , , , , , , –, but this process is not scalable for practical applications. Despite thousands of 2D materials being created, using various stacking combinations, –,, –, hardly any large 2D superconductors can be stacked intact into vdW heterostructures, greatly restricting the applications for such devices. Here we report a high-to-low temperature strategy for controllably growing stacks of multiple-layered vdW superconductor heterostructure (vdWSH) films at a wafer scale. The number of layers of 2D superconductors in the vdWSHs can be precisely controlled, and we have successfully grown 27 double-block, 15 triple-block, 5 four-block and 3 five-block vdWSH films (where one block represents one 2D material). Morphological, spectroscopic and atomic-scale structural analyses reveal the presence of parallel, clean and atomically sharp vdW interfaces on a large scale, with very little contamination between neighbouring layers. The intact vdW interfaces allow us to achieve proximity-induced superconductivity and superconducting Josephson junctions on a centimetre scale. Our process for making multiple-layered vdWSHs can easily be generalized to other situations involving 2D materials, potentially accelerating the design of next-generation functional devices and applications, –.