Signal analysis and characterization of a micro-electro-mechanical oscillator for the study of quantum fluids
Signal analysis and characterization of a micro-electro-mechanical oscillator for the study of quantum fluids
复制标题
用于量子流体研究的微机电振荡器的信号分析和表征
DOI：
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发表时间：
2014
期刊：
影响因子：
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通讯作者：
H. B. Chan
中科院分区：
文献类型：
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作者：
C. Barquist;J. Bauer;T. Edmonds;P. Zheng;W. G. Jiang;M. González;Y. Lee;H. B. Chan
我们提出了一个基于微电子机械系统（MEMS）的量子流体的研究开发的探针的完整表征。该装置由一对具有明确间隙（1.25 μm）的平行板（200 × 200 μm2）组成，当浸入液体中时，在该间隙中形成流体膜。移动的板通过四个蛇形弹簧悬挂在固定板（基板）上方。这种几何形状允许通过移动的板的共振行为来研究周围液体的性质。该装置证明了其作为高精度探针的潜力，适用于量子流体薄膜和量子湍流的研究。在这项工作中，我们对当前测量方案中的设备信号进行了详细分析。基于我们的分析，我们确定了室温和4 K下器件的转换因子，这使我们能够将测量的量转换为物理量，如位移，速度和力。
We present the full characterization of a micro-electro-mechanical system (MEMS) based probe developed for the study of quantum fluids. The device consists of a pair of parallel plates (200 × 200 μm2) with a well-defined gap (1.25 μm) in which a fluid film forms when immersed in liquid. The mobile plate is suspended above the fixed plate (substrate) by four serpentine springs. This geometry allows for the study of the properties of the surrounding liquid through the resonant behavior of the mobile plate. This device demonstrated its potential as a high precision probe suitable for the study of films of quantum fluids and also of quantum turbulence. In this work we present our detailed analysis of the device signal in our current measurement scheme. Based on our analysis, we determined the transduction factor of a device at room temperature and 4 K, which allows us to convert the measured quantities to physical quantities such as displacement, velocity, and force.