CO2 laser ablative etching of polyethylene terephthalate
CO2 laser ablative etching of polyethylene terephthalate
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聚对苯二甲酸乙二醇酯的 CO2 激光烧蚀蚀刻
DOI：
10.1007/bf00694685
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发表时间：
1989
期刊：
影响因子：
--
通讯作者：
J. Sidhu
中科院分区：
文献类型：
--
作者：
P. Dyer;G. Oldershaw;J. Sidhu
用脉冲TEA CO_2激光器的9 μm激光束对聚对苯二甲酸乙二醇酯（PET）薄膜进行了刻蚀。蚀刻深度和能量密度之间的关系与准分子激光蚀刻所观察到的大致相似，但具有较不明确的阈值。在相互作用中产生的应力波的时间分辨光声测量表明，在1.8 J cm−2的能量密度下，在激光脉冲开始后100-200 ns发生烧蚀，该时间与PET的热分解速率一致。烧蚀的挥发性产物是一氧化碳、二氧化碳、甲烷、乙炔、乙烯、苯、乙醛和少量其他产物。对于接近和明显高于阈值的能量密度，烧蚀材料主要由相对高分子量的不挥发物质组成，而在较高的能量密度下，聚合物大量碎裂成小分子。
Films of polyethylene terephthalate (PET) can be successfully etched with 9 μm radiation from a pulsed TEA CO2 laser. The relationship between etch depth and fluence is broadly similar to that observed for excimer laser etching but with a less well-defined threshold. Time-resolved photoacoustic measurements of stress waves generated in the interaction show that at a fluence of 1.8 J cm−2 ablation occurs 100–200 ns after the start of the laser pulse, a time which is consistent with the rate of thermal decomposition of PET. The volatile products of ablation are carbon monoxide, carbon dioxide, methane, ethyne, ethene, benzene, ethanal, and small quantities of other products. For fluences close to and appreciably above the threshold the ablated material consists predominantly of involatile species of relatively high molecular weight, whereas at higher fluences substantial fragmentation of the polymer to small molecules occurs.