Fabrication of high quality multilayer blazed gratings using ion beam assisted deposition
Fabrication of high quality multilayer blazed gratings using ion beam assisted deposition
复制标题
使用离子束辅助沉积制造高质量多层闪耀光栅
DOI：
10.1063/1.4984916
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发表时间：
2017
影响因子：
3.2
通讯作者：
R. M. Bradley
中科院分区：
文献类型：
--
作者：
Matt P. Harrison;R. M. Bradley
提出了一种利用离子束辅助沉积技术制备高质量多层闪耀光栅的方法，并进行了数值模拟分析。传统的多层闪耀光栅的制作方法受到多层膜沉积过程中表面轮廓不必要的平滑的限制。相比之下，我们表明，我们提出的方法是能够产生光栅，保留一个近乎理想的闪耀光栅轮廓后，沉积任意数量的层。通过数值分析，我们建立了该过程中产生高质量的多层闪耀光栅的条件。这些光栅将适用于极紫外或软X射线领域。我们还讨论了如何选择控制参数，以优化在实验中形成的光栅。
A method for generating high quality multilayer blazed gratings using ion beam assisted deposition is proposed and analyzed with numerical simulations. Conventional fabrication methods for multilayer blazed gratings are limited by unwanted smoothing of the surface profile during multilayer deposition. By contrast, we demonstrate that our proposed method is capable of producing gratings that retain a nearly ideal blazed grating profile after the deposition of an arbitrary number of layers. Through numerical analysis, we establish the conditions in which this procedure produces a high quality multilayer blazed grating. These gratings would be suitable for use in the extreme ultraviolet or soft X-ray regime. We also discuss how the control parameters may be selected to optimize the gratings formed in an experiment.