Self-assembled microactuated XYZ stages for optical scanning and alignment
Self-assembled microactuated XYZ stages for optical scanning and alignment
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用于光学扫描和对准的自组装微驱动 XYZ 平台
DOI：
10.1109/sensor.1997.613648
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发表时间：
1997
期刊：
影响因子：
--
通讯作者：
M. H. Crawford
中科院分区：
文献类型：
--
作者：
L. Fan;Ming C. Wu;K. D. Choquette;M. H. Crawford
一种新型自组装、表面微机械加工的微型 XYZ 平台具有大位移和高精度定位精度，已在用于光学扫描/对准应用的硅微光学工作台上进行了演示。使用步进分辨率为 27 nm 的集成划痕驱动执行器 (SDA) 可以实现高达 120 /spl mu/m 的连续横向扫描和高达 250 /spl mu/m 的垂直扫描。仅通过施加电偏压即可完全组装 XYZ 平台。集成在微型 XYZ 平台上的微型菲涅耳透镜的焦点调节也已成功演示。这对于二维扫描、动态聚焦/跟踪和精细光学对准非常有用。
A novel self-assembled, surface-micromachined micro-XYZ stage with large displacements and fine positioning accuracy has been demonstrated on a Si microoptical bench for optical scanning/alignment applications. Continuous lateral scanning up to 120 /spl mu/m and vertical scanning up to 250 /spl mu/m have been achieved with integrated scratch drive actuators (SDA), which have step resolutions of 27 nm. The XYZ stage can be fully assembled by applying an electric bias only. Focus adjustment of the micro-Fresnel lens integrated on the micro-XYZ stage has also been successfully demonstrated. This is useful for two-dimensional scanning, dynamic focusing/tracking, and fine optical alignment.