Photoluminescence Evaluation of Defects Generated during Temperature Ramp-up Process of SiGe-On-Insulator virtual Substrate Fabrication
Photoluminescence Evaluation of Defects Generated during Temperature Ramp-up Process of SiGe-On-Insulator virtual Substrate Fabrication
复制标题
绝缘体上硅锗虚拟衬底制造升温过程中产生的缺陷的光致发光评估
DOI:
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发表时间:
2006
期刊:
影响因子:
--
通讯作者:
H.Nakashima
中科院分区:
文献类型:
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作者:
D.Wang;S.Ii;K.Ikeda;H.Nakashima;H.Nakashima
影响因子:
3.2
作者:
N. Usami;K. Leo;Y. Shiraki
通讯作者:
Y. Shiraki