Development of a Shear Horizontal Surface Acoustic Wave Sensor System for Liquids with a Floating Electrode Unidirectional Transducer
Development of a Shear Horizontal Surface Acoustic Wave Sensor System for Liquids with a Floating Electrode Unidirectional Transducer
复制标题
具有浮动电极单向传感器的液体剪切水平表面声波传感器系统的开发
DOI：
10.1143/jjap.47.4065
复制
发表时间：
2008
影响因子：
1.5
通讯作者：
H. Yatsuda
中科院分区：
文献类型：
--
作者：
J. Kondoh;Y. Okiyama;S. Mikuni;Y. Matsui;M. Nara;Toshimasa Mori;H. Yatsuda
利用声表面波（SAW）器件的传感器的发展一直备受关注。水平剪切声表面波（SH-SAW）传感器可以检测液体中的性质和化学反应。为了实现SAW传感器的实际应用，有必要对其特性进行讨论。本文比较了浮置电极单向换能器（FEUDT）和叉指换能器（IDT）的SH SAW传感器，测量了它们的插入损耗和相位特性。此外，样品和参考液体之间的相移进行评估。结果表明，采用该结构的声表面波传感器适用于液体测量。然后将具有FEUDT的SH-SAW传感器安装在新开发的SH-SAW传感系统中。系统配置与矢量电压表测量系统相同。然而，已经开发出减小其尺寸的电路。使用该系统，可以测量多种液体。所得结果与理论值吻合较好。
The development of sensors using surface acoustic wave (SAW) devices has been attracting attention. A shear horizontal SAW (SH-SAW) sensor can detect the properties and chemical reactions in liquids. To realize practical applications of the SAW sensor, it is necessary to discuss its properties. In this paper, SH-SAW sensors with a floating electrode unidirectional transducer (FEUDT) or an interdigital transducer (IDT) are compared and the insertion loss and phase characteristics are measured. Also, the phase shift between sample and reference liquids is evaluated. The results indicate that the SH-SAW sensor with the FEUDT is suitable for liquid measurements. The SH-SAW sensor with the FEUDT is then mounted in a newly developed SH-SAW sensing system. The system configuration is the same as that of a vector voltmeter measurement system. However, circuits have been developed that reduce its size. Using this system, several liquids are measured. The obtained results agree well with the theoretical values.