Oxygen-ion beam polishing of a 5-cm-diameter diamond film.
Oxygen-ion beam polishing of a 5-cm-diameter diamond film.
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DOI：
10.1364/ao.31.002366
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发表时间：
1992-05
期刊：
影响因子：
1.9
通讯作者：
B. Bovard;T. Zhao;H. Macleod
中科院分区：
文献类型：
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作者：
B. Bovard;T. Zhao;H. Macleod
直径 5 厘米、厚度 1 微米（峰至谷）的毛坯金刚石薄膜已通过氧离子束抛光至光学质量。抛光表面的均方根粗糙度值和峰谷粗糙度值分别降低至 5.5 和 55.4 nm。反应离子束抛光提供了一种低温（140 摄氏度）、非接触且精确可控的方法来提高金刚石薄膜的表面质量。这一进展对于金刚石涂层在光学应用中的使用至关重要。
A 5-cm diameter, 1-microm (peak to valley) rough diamond film has been polished to optical quality by an oxygen-ion beam. The rms and peak-to-valley roughness values of the polished surface have been lowered to 5.5 and 55.4 nm, respectively. Reactive ion beam polishing provides a low-temperature (140 degrees C), noncontact, and precisely controllable approach to improving the surface quality of diamond films. This progress is essential to the use of diamond coatings in optical applications.