电场作用下热处理对(100)取向的铁电PZT(52/48)薄膜应变和铁电性能影响研究
电场作用下热处理对(100)取向的铁电PZT(52/48)薄膜应变和铁电性能影响研究
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DOI：
10.1016/j.jpcs.2016.08.020
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发表时间：
2016
影响因子：
4
通讯作者：
靳辰飞
中科院分区：
文献类型：
--
作者：
张思琦;王盛凯;郑馥;靳辰飞
采用溶胶-凝胶法在Pt/Ti/SiO2/Si衬底上制备了Pb（Zr0.52Ti0.48）O3铁电薄膜。在热处理过程中，对薄膜施加直流电场，研究了薄膜的应变行为和铁电性能。X射线衍射结果表明，在250 nm薄膜的界面附近存在较大的拉伸应变，而直流电场辅助热处理可以使薄膜的拉伸应变明显弛豫;磁滞回线分析表明，薄膜的剩余极化随热处理时间的延长而增大。这些结果表明，电场辅助热处理是通过Pt层的局部塑性变形减小薄膜拉伸应变，提高剩余极化的有效方法。
Ferroelectric Pb(Zr0.52Ti0.48)O3 thin films were deposited on the Pt/Ti/SiO2/Si substrate by a sol-gel method. As a direct electric field was applied on the films during thermal treatment, strain behavior and ferroelectric properties have been investigated. X-ray diffraction patterns show that great tensile strain exists nearby the interface of the 250 nm thin film while thermal treatment assisted with direct electric field can obviously relax it. The analysis of hysteresis loops indicates that the remnant polarization increases with the thermal treatment time. These results suggest that electric-field-assisted thermal treatment is an effective way to reduce films' tensile strain through the local plastic deformation in Pt layer and enhance the remnant polarization.