Process variability at the 65nm node and beyond
Process variability at the 65nm node and beyond
复制标题
65 纳米及以上节点的工艺可变性
DOI:
10.1109/cicc.2008.4672005
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发表时间:
2008
期刊:
影响因子:
--
通讯作者:
S. Nassif
中科院分区:
文献类型:
--
作者:
S. Nassif
The impact of manufacturing-induced variations has been well established as a first order impediment to modern integrated circuit design [1]. Numerous research efforts are currently underway to (a) understand and characterize variability[2], to (b) predict its impact on circuit behavior[3], and (c) to develop layout and circuit design techniques to reduce the impact of variability[4]. Simultaneously, except for the most advanced high performance designs, the increasing cost of migrating to sub-65 nm technology nodes is slowing down adoption of advanced technologies. This slow down is allowing current efforts to catch up and help mitigate variability as an impediment.