Structural, chemical and nanomechanical investigations of SiC/polymeric a-C:H films deposited by reactive RF unbalanced magnetron sputtering
Structural, chemical and nanomechanical investigations of SiC/polymeric a-C:H films deposited by reactive RF unbalanced magnetron sputtering
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DOI：
10.1016/j.solidstatesciences.2015.12.022
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发表时间：
2016-03
影响因子：
3.5
通讯作者：
C. Tomastik;J. Lackner;A. Pauschitz;M. Roy
中科院分区：
文献类型：
--
作者：
C. Tomastik;J. Lackner;A. Pauschitz;M. Roy
