Slit Design Consideration on the Ferromagnetic RF Integrated Inductor
Slit Design Consideration on the Ferromagnetic RF Integrated Inductor
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DOI：
10.1109/intmag.2006.376405
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发表时间：
2006-05
影响因子：
2.1
通讯作者：
M. Yamaguchi;K. Yamada;Ki Hyeon Kim
中科院分区：
文献类型：
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作者：
M. Yamaguchi;K. Yamada;Ki Hyeon Kim
微加工了五种类型的射频集成螺旋电感，讨论了薄膜中的局部各向异性场分布和线圈截面上的局部电流分布，这些分布对复合磁导率、铁磁共振(FMR)频率和电感电容(LC)谐振频率的频率分布有很大影响。移位型电感在1.9 GHz处表现出20.7的高品质因数，这是因为在测试电感中本地铁磁共振频率最高且电流分布最均匀
Five types of RF integrated spiral inductors were microfabricated and applied for the discussion of local anisotropy field distribution in the film and the local current distribution in the coil cross section, which strongly influences the frequency profile of the complex permeability, ferromagnetic resonance (FMR) frequency and inductance-capacitance (LC) resonance frequency. The shifted type inductor exhibited as high quality factor as 20.7 at 1.9 GHz because the local FMR frequency is the highest and the current distribution is most uniform among the test inductors