Investigation of mechanical losses of thin silicon flexures at low temperatures

Investigation of mechanical losses of thin silicon flexures at low temperatures
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低温下薄硅挠曲机械损失的研究

DOI:
10.1088/0264-9381/30/11/115008
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发表时间:
2013
影响因子:
3.5
通讯作者:
A. T¨
A. T¨
中科院分区:
物理与天体物理3区
文献类型:
--
作者:
R. Nawrodt;C. Schwarz;S. Kroker;I. W. Martin;R. Bassiri;F. Br¨ uckner;L. Cunningham;G. D. Hammond;D. Heinert;J. Hough;T. K¨asebier;E.-B. Kley;R. Neubert;S. Reid;S. Rowan;P. Seidel;A. T¨

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硅弯曲的机械损耗的研究在温度范围从5到300 K,其中弯曲已准备由不同的制造技术的利益,为未来的干涉引力波探测器的悬浮元件的建设。在10 K左右,对于130 μm厚的弯曲件,观察到最低的机械损耗为3× 10− 8。虽然机械损失遵循热弹性预测下降到50 K,在较低的温度下,所观察到的损失被发现是表面粗糙度的函数。这种表面损耗对于在低温下使用硅基振荡器的所有应用都是有意义的。从我们的测量结果和其他作者的表面损失参数的提取和未来的引力波探测器悬浮液的相关性进行了讨论。获得了表面损失参数α s= 0.5 pm。这表明硅的表面损失显著低于熔融石英的表面损失。
Studies of the mechanical loss of silicon flexures in a temperature region from 5 to 300 K are presented, where the flexures have been prepared by different fabrication techniques of interest for the construction of suspension elements of future interferometric gravitational wave detectors. A lowest mechanical loss of 3× 10− 8 was observed for a 130 μm thick flexure at around 10 K. While the mechanical loss follows the thermo-elastic predictions down to 50 K, at lower temperatures the observed loss is found to be a function of surface roughness. This surface loss is of interest for all applications using silicon-based oscillators at low temperatures. The extraction of a surface loss parameter using results from our measurements and those of other authors is presented and the relevance for future gravitational wave detector suspensions is discussed. A surface loss parameter α s= 0.5 pm was obtained. This reveals that the surface loss of silicon is significantly lower than the surface loss of fused silica.
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