Form determination of optical surfaces by measuring the spatial coherence function using shearing interferometry.
Form determination of optical surfaces by measuring the spatial coherence function using shearing interferometry.
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DOI：
10.1364/oe.26.027991
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发表时间：
2018-10
期刊：
影响因子：
3.8
通讯作者：
Jan-Hendrik Hagemann;C. Falldorf;G. Ehret;R. Bergmann
中科院分区：
文献类型：
--
作者：
Jan-Hendrik Hagemann;C. Falldorf;G. Ehret;R. Bergmann
我们提出了一种利用空间相干函数测量光学表面形状的新方法，该方法使剪切干涉仪与LED多点照明相结合作为测量装置。一种新的评价方法是将测量数据与曲面形态进行反射线追踪。首先给出了逆评价程序的测量结果。我们结合评价程序提出了整个测量方法。此外，还研究了所实现的优化任务的收敛性和稳定性。
We present a new method for the form measurement of optical surfaces using the spatial coherence function, which enables a shearing interferometer in combination with an LED multispot illumination to function as a measurement device. A new evaluation approach connects the measured data with the surface form by inverse raytracing. First measurement results with the inverse evaluation procedures are shown. We present the whole measurement in combination with the evaluation procedure. In addition, the convergence and stability of the implemented optimization task is investigated.