CWレーザ背面照射法(CW-LBI)によるガラスの内部変質 (第3報):—ガラス内部への白金微粒子の導入—

CWレーザ背面照射法(CW-LBI)によるガラスの内部変質 (第3報):—ガラス内部への白金微粒子の導入—
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连续激光背面照射(CW-LBI)对玻璃的内部改变(第三次报告):—将铂细颗粒引入玻璃内部—

DOI:
10.2493/jjspe.76.577
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发表时间:
2010
期刊:
影响因子:
--
通讯作者:
戸倉 和
戸倉 和
中科院分区:
--
文献类型:
--
作者:
山崎 貴斗;洋史 比田井;戸倉 和

文献摘要

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我们利用连续波(CW)激光照射,展示了金属粒子注入玻璃板的技术。在玻璃表面一侧沉积了厚度为1μm的铂薄膜。用聚焦的Ar离子激光束从玻璃的另一面照射铂薄膜。将激光功率设置为4.2W,使铂薄膜熔化,在0.1S范围内注入直径为5μm的铂颗粒。激光照射使铂颗粒周围的玻璃软化,使铂颗粒在玻璃中迁移。有趣的是,颗粒以∼0.2 mm/S的速度向光源移动了3 mm以上。能谱分析表明,颗粒是铂,没有检测到玻璃中的硅和氧。对铂颗粒的迁移轨迹进行了修正,使其能够在光学显微镜下观察到。在铂颗粒的轨迹中没有检测到铂。改性带直径为∼10μm。
We demonstrate metal particle implantation technique into glass plate by continuous-wave (CW) laser beam illumination. Platinum film with the thickness of 1 μm was deposited on one side of Pyrex glass surface. The platinum film was radiated with a focused Ar ion laser beam from the other side of the glass. The laser power was set at 4.2 W. As a result, the platinum film was melted and a platinum particle with the diameter of 5 μm was implanted into the glass within 0.1 s after the laser illumination. The glass around the platinum particle heated by the laser illumination was softened, which enables the platinum particle migration in the glass. Interestingly, the particle moved more than 3 mm toward the light source with the speed of ∼ 0.2 mm/s. Energy dispersive X-ray spectroscopy (EDS) clarify that the particle was platinum, and silicon and oxygen, which were components of glass, were not detected. Trajectory of the platinum particle migration was modified and was able to be observed by an optical microscope. No platinum was detected in the trajectory of the platinum particle. The diameter of the modified zone was ∼ 10 μm.