Simulation-Guided 3D Nanomanufacturing via Focused Electron Beam Induced Deposition
Simulation-Guided 3D Nanomanufacturing via Focused Electron Beam Induced Deposition
复制标题
DOI：
10.1021/acsnano.6b02108
复制
发表时间：
2016-06-01
期刊：
影响因子：
17.1
通讯作者：
Rack, Philip D.
中科院分区：
文献类型：
--
作者：
Fowlkes, Jason D.;Winkler, Robert;Rack, Philip D.
聚焦电子束诱导沉积（FEBID）是少数几种能够直接写入合成独立式3D纳米结构的技术之一。虽然通过简单的试验和错误已经实现了诸如垂直或弯曲纳米线的简单架构的制造，但是用这种方法处理复杂的3D结构并不容易。在某种程度上，这是由于电子-固体相互作用和固体表面上吸收的前体分子的瞬态空间分布之间的动态相互作用。在这里，我们展示了可控的存款三维晶格结构的能力，在微米/纳米级，这已收到最近的兴趣，由于上级机械和光学性能。一个混合蒙特卡罗连续模拟简要概述，随后FEBID实验和模拟直接比较。最后，介绍了一个三维计算机辅助设计（CAD）程序，该程序通过模拟和实验生成FEBID所需的光束参数。使用这种方法，我们证明了使用Pt，Au，和W-基前体的各种3D晶格结构的制造。
Focused electron beam induced deposition (FEBID) is one of the few techniques that enables direct write synthesis of free-standing 3D nanostructures. While the fabrication of simple architectures such as vertical or curving nanowires has been achieved by simple trial and error, processing complex 3D structures is not tractable with this approach. In part, this is due to the dynamic interplay between electron solid interactions and the transient spatial distribution of absorbed precursor molecules on the solid surface. Here, we demonstrate the ability to controllably deposit 3D lattice structures at the micro/nanoscale, which have received recent interest owing to superior mechanical and optical properties. A hybrid Monte Carlo continuum simulation is briefly overviewed, and subsequently FEBID experiments and simulations are directly compared. Finally, a 3D computer-aided design (CAD) program is introduced, which generates the beam parameters necessary for FEBID by both simulation and experiment. Using this approach, we demonstrate the fabrication of various 3D lattice structures using Pt-, Au-, and W-based precursors.