From Light to Displacement: A Design Framework for Optimising Spectral-Domain Low-Coherence Interferometric Sensors for In Situ Measurement
From Light to Displacement: A Design Framework for Optimising Spectral-Domain Low-Coherence Interferometric Sensors for In Situ Measurement
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DOI：
10.3390/app10238590
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发表时间：
2020-12-01
影响因子：
2.7
通讯作者：
Kinnell, Peter
中科院分区：
文献类型：
--
作者：
Hovell, Tom;Petzing, Jon;Kinnell, Peter
在制造期间对原位计量的增长的需求已经导致对用于工业领域的低相干干涉测量（LCI）的光学相干断层扫描（OCT）配置的兴趣增加。本文探讨了优化的频谱域OCT硬件和信号处理等实现。整理的OCT配置LCI系统的基础理论，从不同的来源链接的旅程，从物体表面反射的光的定义的被测量。这是描绘在一个适用的，可理解的设计框架，通过其应用轮廓测量优化系统性能。
Growing requirements for in situ metrology during manufacturing have led to an increased interest in optical coherence tomography (OCT) configurations of low coherence interferometry (LCI) for industrial domains. This paper investigates the optimisation of spectral domain OCT hardware and signal processing for such implementations. A collation of the underlying theory of OCT configured LCI systems from disparate sources linking the journey of the light reflected from the object surface to the definition of the measurand is presented. This is portrayed in an applicable, comprehensible design framework through its application to profilometry measurements for optimising system performance.