Scanning Electron Microscope Observation of Channeling Contrast for Characterization of Dislocations in Metals and Semiconductor Materials

Scanning Electron Microscope Observation of Channeling Contrast for Characterization of Dislocations in Metals and Semiconductor Materials
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扫描电子显微镜观察沟道对比以表征金属和半导体材料中的位错

DOI:
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发表时间:
2008
期刊:
影响因子:
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通讯作者:
Y. Nagatomo and S. Tachibana
Y. Nagatomo and S. Tachibana
中科院分区:
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文献类型:
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作者:
N. Kuwano;M. Itakura;Y. Nagatomo and S. Tachibana

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