Fabrication and analysis of awl-shaped serpentine microsprings for large out-of-plane displacement
Fabrication and analysis of awl-shaped serpentine microsprings for large out-of-plane displacement
复制标题
大平面外位移锥状蛇形微弹簧的制作与分析
DOI：
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发表时间：
2015
期刊：
影响因子：
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通讯作者：
Rongshun Chen
中科院分区：
文献类型：
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作者：
Hui;M. Lin;Rongshun Chen
本文研究了一种用于悬架结构的新型锥形蛇形微弹簧，在出平面运动时，在相同的单位布置面积下具有较低的弹簧常数。利用卡氏定理，从理论上推导了微弹簧的弹簧常数，并利用COMSOL Multiphysics进行了仿真，以验证理论结果。采用硅基微机械加工技术成功地制作了锥形蛇形微弹簧。通过实验对理论计算结果和数值计算结果进行了比较，两者吻合较好。此外，定义了弹簧常数与布局面积比（K/A）的参数，以用作在相同单位面积下比较弹簧常数的指标。因此，锥形蛇形微弹簧具有比具有相同总有效长度和折叠的传统蛇形微弹簧更低的K/A值。锥角越大、折叠越多、梁宽度越小、梁厚度越小，锥形蛇形微弹簧的K/A值越小。利用所提出的数学模型，可以计算出不同尺寸和几何结构的微弹簧的弹簧常数在出平面运动的微结构制造之前。因此，在设计具有适当弹簧常数的微弹簧时节省了时间。
This work investigates a novel awl-shaped serpentine microspring for a suspension structure, with a lower spring constant under the same unit layout area in out-of-plane motion. Using Castigliano’s theorem, the spring constant of the microspring was theoretically derived and simulations were performed using COMSOL Multiphysics to verify the theoretical results. The proposed awl-shaped serpentine microspring was successfully fabricated using silicon-based micromachining. Experiments were conducted to compare the theoretical and numerical results, which were in close agreement. In addition, a parameter of spring constant to layout area ratio (K/A) is defined to be used as the index for comparing spring constants under the same unit area. Accordingly, the awl-shaped serpentine microspring has a lower K/A value than the traditional serpentine microspring with the same total effective length and folds. With a greater taper angle, more folds, a smaller beam width, and lower beam thickness, the awl-shaped serpentine microspring has a smaller K/A value. Using the proposed mathematical model, the spring constants of microsprings of various sizes and geometric structures can be calculated in out-of-plane motion before the microstructure is fabricated. Thus, it saves time when designing a microspring with a proper spring constant.