High-resolution electrohydrodynamic jet printing
High-resolution electrohydrodynamic jet printing
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DOI：
10.1038/nmat1974
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发表时间：
2007-10-01
期刊：
影响因子：
41.2
通讯作者：
Rogers, John A.
中科院分区：
文献类型：
--
作者：
Park, Jang-Ung;Hardy, Matt;Rogers, John A.
近年来，调整和扩展图形艺术印刷技术以用于电子、生物技术和微机电系统中的要求苛刻的设备应用的努力迅速增长。在这里，我们描述了使用电流体动力学引起的流体流动通过精细的微毛细管喷嘴的图案和功能器件的亚微米分辨率的喷射印刷。这种方法的物理学的关键方面，它有一些共同的特点，但相对较低的分辨率的图形艺术技术，揭示了通过直接高速成像的液滴形成过程。使用集成的计算机控制打印机系统打印复杂图案的油墨，从绝缘和导电聚合物到硅纳米颗粒和棒的溶液悬浮液，再到单壁碳纳米管，说明了一些能力。用于代表性电路图案和关键尺寸小至1 μ m的功能晶体管的高分辨率印刷金属互连、电极和探测焊盘展示了印刷电子领域的潜在应用。
Efforts to adapt and extend graphic arts printing techniques for demanding device applications in electronics, biotechnology and microelectromechanical systems have grown rapidly in recent years. Here, we describe the use of electrohydrodynamically induced fluid flows through fine microcapillary nozzles for jet printing of patterns and functional devices with submicrometre resolution. Key aspects of the physics of this approach, which has some features in common with related but comparatively low-resolution techniques for graphic arts, are revealed through direct high-speed imaging of the droplet formation processes. Printing of complex patterns of inks, ranging from insulating and conducting polymers, to solution suspensions of silicon nanoparticles and rods, to single-walled carbon nanotubes, using integrated computer-controlled printer systems illustrates some of the capabilities. High-resolution printed metal interconnects, electrodes and probing pads for representative circuit patterns and functional transistors with critical dimensions as small as 1 mu m demonstrate potential applications in printed electronics.