Near‐field optical microscopy in transmission and reflection modes in combination with force microscopy

Near‐field optical microscopy in transmission and reflection modes in combination with force microscopy
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透射和反射模式的近场光学显微镜与力显微镜相结合

DOI:
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发表时间:
1993
期刊:
影响因子:
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通讯作者:
B. Bölger
B. Bölger
中科院分区:
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文献类型:
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作者:
N. F. Hulst;M. Moers;B. Bölger

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近场光学显微镜是各种类型的扫描探针显微镜的光学替代品。该技术克服了传统光学显微镜的经典衍射极限。本文介绍了近场光学(NFO)的概念,并简要介绍了近场光学显微镜的发展趋势。具体地说,讨论了孔径和介电探针类型的效率和通用性的发展。我们介绍了NFO显微技术的进展,使用纤维和集成氮化硅(SiN)结构作为介电探针。使用SiN探针作为组合光学和力传感器被证明是有利的,因为它提供了反馈机制,并允许直接比较地形和介电效应。技术和生物样品的图像呈现的横向分辨率低至20纳米,这取决于所使用的显微排列。
Near‐field optical microscopy is the optical alternative of the various types of scanning probe microscopes. The technique overcomes the classical diffraction limit in conventional optical microscopy. In this paper the concepts of near‐field optics (NFO) are introduced, followed by a short review of current trends in NFO microscopy. Specifically, developments concerning the efficiency and versatility of both aperture and dielectric probe types are discussed. We present our advances in NFO microscopy, using both fibres and integrated silicon nitride (SiN) structures as dielectric probes. The use of an SiN probe as a combined optical and force sensor is shown to be advantageous, as it provides a feedback mechanism and allows direct comparison between topography and dielectric effects. Images of technical and biological samples are presented with a lateral resolution down to 20 nm, depending on the microscopical arrangement used.