A bio-inspired 3D-printed hybrid finger with integrated ECF (electro-conjugate fluid) micropumps
A bio-inspired 3D-printed hybrid finger with integrated ECF (electro-conjugate fluid) micropumps
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DOI：
10.1016/j.sna.2017.02.002
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发表时间：
2017-04-15
影响因子：
4.6
通讯作者：
Yokota, Shinichi
中科院分区：
文献类型：
--
作者：
Han, Dong;Gu, Hongri;Yokota, Shinichi
本文提出了一种新型的3D打印混合手指嵌入ECF（电共轭流体）微泵灵感来自蜘蛛腿的液压机构。两个集成的ECF微泵通过手指内置的流体通道分别控制两个波纹管关节，实现2自由度的柔顺运动。取代传统的CNC加工、成型和多次手工装配，混合材料的3D打印技术（硬软材料）被用于制造我们的混合手指，其包括（a）一个整体主体，其具有覆盖有橡胶片的指体基部和两个波纹管状接头的组合，（B）三个与橡胶片组合的指体盖，解决了与复杂的加工、精细的成型以及软、硬部件的精密组装和接口相关的恼人问题。采用厚胶微成型和电镀镍的MEMS工艺设计并制作了一种带有三角棱镜狭缝电极对（TPSEs）的ECF微泵。输出压力和输出流量测量等特性实验表明，所制作的ECF微泵具有较高的输出功率密度。成功实现了基于ECF微泵的混合手指，并通过驱动实验验证了该方案的可行性。(C)2017爱思唯尔B.V.保留所有权利。
The paper proposes a novel 3D-printed hybrid finger embedding ECF (electro-conjugate fluid) micropumps inspired from the hydraulic mechanism of spider legs. Two integrated ECF micropumps control two bellows-like joints respectively through fluidic channels built in the finger to realize the compliant motion with 2 DOFs (degree-of-freedom). Instead of the traditional CNC machining, molding and multiple manual assembly, the 3D printing technology of hybrid-material (hard and soft material) is utilized to fabricate our hybrid finger, which consists of (a) one monolithic body with the combination of a finger body base covered with rubber sheets and two bellows-like joints, (b) three finger body covers combined with rubber sheets, solving the annoying problems related to the complicated machining, the elaborate molding, and the delicate assembly and interfacing of soft and hard components. The ECF micropump with TPSEs (triangular prism & slit electrode pairs) was designed and fabricated by the MEMS process based on the micro-molding with thick photoresist and nickel electroplating. Characteristics experiments including output pressure and output flow rate measurement demonstrated that the fabricated ECF micropump had high output power density. The hybrid finger with ECF micropumps was successfully realized and its driving experiments validated the feasibility of our concept. (C) 2017 Elsevier B.V. All rights reserved.