In-process measuring of the electrical shunt resistance of laser-scribed thin-film stacks by nested circular scribes.
In-process measuring of the electrical shunt resistance of laser-scribed thin-film stacks by nested circular scribes.
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通过嵌套圆形划线对激光划线薄膜叠层的电分流电阻进行过程测量。
DOI：
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发表时间：
2013
影响因子：
1.6
通讯作者：
K. Zimmer
中科院分区：
文献类型：
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作者：
X. Wang;M. Ehrhardt;P. Lorenz;C. Scheit;S. Ragnow;X. Ni;K. Zimmer
功能薄膜叠层的激光刻划越来越受到人们的关注，特别是在柔性电子和光伏领域的应用。激光可以选择性地去除对太阳能电池的隔离和互连至关重要的薄膜堆。关于器件功能特性的激光刻划过程的优化需要定制的表征技术，以最大限度地减少副作用。所提出和演示的嵌套圆形激光刻划技术允许在过程中测量电特性，例如，由于薄膜堆的激光刻划而形成的分流，最大限度地减少由老化，接触，样品特性改变或测量条件改变引起的二次效应。该技术能够通过激光刻划识别太阳能电池特性变化的可靠和快速信息，这在本工作中得到了证明。
Laser scribing of functional thin-film stacks attracts increasing attention especially for applications of flexible electronics or photovoltaics. Laser can perform selective removal of the thin-film stacks that is essential for the isolation and interconnection of the solar cells. The optimization of the laser scribing process concerning the functional properties of the device requires customized characterization techniques minimizing side effects. The proposed and demonstrated nested circular laser scribing technique allows the in-process measurement of the electrical characteristics, e.g., the shunt formation due to laser scribing of the thin-film stack, minimizing secondary effects originating from aging, contacting, changing of sample characteristics, or alterations of the measurement conditions. This technique enables the identification of reliable and quick information on the changes of the solar cell characteristics by laser scribing as this is demonstrated in this work.