Mass Spectroscopic Analysis of Process of Single-Walled Carbon Nanotube Growth by Hot-Filament-Assisted Plasma Chemical Vapor Deposition

Mass Spectroscopic Analysis of Process of Single-Walled Carbon Nanotube Growth by Hot-Filament-Assisted Plasma Chemical Vapor Deposition
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热丝辅助等离子体化学气相沉积单壁碳纳米管生长过程的质谱分析

DOI:
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发表时间:
2004
期刊:
Proc.International COE Forum on Plasma Science and Technology
影响因子:
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通讯作者:
S.Nishino
S.Nishino
中科院分区:
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文献类型:
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作者:
Y.Hayashi;Y.Kogawara;Y.Morimoto;S.Nishino

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