Comprehensive modeling of Joule heated cantilever probes
Comprehensive modeling of Joule heated cantilever probes
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DOI：
10.1063/1.4981883
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发表时间：
2017-05-07
影响因子：
3.2
通讯作者：
Knoll, A. W.
中科院分区：
文献类型：
--
作者：
Spieser, M.;Rawlings, C.;Knoll, A. W.
基于已建立的硅中热导率、简并硅支撑结构中电导率的经验定律以及低掺杂加热器结构中电导率的综合物理模型，对用于热扫描探针光刻的复杂硅悬臂梁结构的热电性能进行了建模。模型计算使用了一组物理上定义良好的材料参数和有限元方法来求解悬臂梁中的热和电耦合扩散方程。材料参数是通过数值结果与相应的测量数据的非线性回归拟合来确定的，其中还包括加热器温度的拉曼测量。如果在加热器中使用锥形掺杂分布，则在没有空气冷却的情况下，预测值与实测值之间的一致性很好。在无参数三维模拟中，还研究了通过周围空气的热损失。仿真结果表明，通过对功率-温度关联函数中的功率进行全局定标，可以根据提供给悬臂梁的电功率准确地预测加热器的温度，而功率-温度关联函数可以由真空模拟确定。由AIP出版公司出版。
The thermo-electrical properties of a complex silicon cantilever structure used in thermal scanning probe lithography are modeled based on well established empirical laws for the thermal conductivity in silicon, the electrical conductivity in the degenerate silicon support structure, and a comprehensive physical model of the electrical conductivity in the low-doped heater structure. The model calculations are performed using a set of physically well defined material parameters and finite element methods to solve the coupled thermal and electrical diffusion equations in the cantilever. The material parameters are determined from a non-linear regression fit of the numerical results to corresponding measured data, which also includes Raman measurements of the heater temperature. Excellent agreement between predicted and measured data in the absence of air cooling is obtained if a tapered doping profile in the heater is used. The heat loss through the surrounding air is also studied in a parameter free three-dimensional simulation. The simulation reveals that the heater temperature can be accurately predicted from the electrical power supplied to the cantilever via a global scaling of the power in the power-temperature correlation function, which can be determined from the vacuum simulation. Published by AIP Publishing.