Y.Ishikawa: "Diffusion of Phosphorus and Boron into Silicon at Low Temperatures by Heating with Light Irradiation" Japanese Journal of Applied Physics. vol.36. 7433-7436 (1997)
Y.Ishikawa: "Diffusion of Phosphorus and Boron into Silicon at Low Temperatures by Heating with Light Irradiation" Japanese Journal of Applied Physics. vol.36. 7433-7436 (1997)
复制标题
Y.Ishikawa:“通过光照射加热在低温下将磷和硼扩散到硅中”日本应用物理学杂志。
DOI:
--
复制
发表时间:
--
期刊:
影响因子:
--
通讯作者:
中科院分区:
文献类型:
--
作者: