A Novel Benzocyclobutene-Based Device for Studying the Dynamics of Heat Transfer During the Nucleation Process
A Novel Benzocyclobutene-Based Device for Studying the Dynamics of Heat Transfer During the Nucleation Process
复制标题
用于研究成核过程中传热动力学的新型苯并环丁烯基装置
DOI：
10.1109/jmems.2007.907781
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发表时间：
2007
影响因子：
2.7
通讯作者：
R. Ghodssi
中科院分区：
文献类型：
--
作者：
Saeed Moghaddam;Kenneth T. Kiger;A. Modafe;R. Ghodssi
研制了一种新型的微电子机械装置，用于研究核态沸腾过程中核化部位的换热机理。这种装置能够量化表面不同热传递机制的大小、激活时间和特定影响区域，分辨率比以前报道的高几倍。这是通过在精心设计的双层(硅和苯环丁烯)墙内使用嵌入的温度传感器阵列来实现的，该双层墙允许准确计算局部热通量，绕过了使用现有方法时遇到的困难。传感器呈放射状分布在成核点周围。通过在外部非湿润表面上制造的薄膜加热器将热量提供给墙壁。在阵列的中心产生单个气泡，同时以8 kHz的采样频率记录温度和气泡图像。温度数据为数值计算地表热通量提供了必要的热边界条件，其径向分辨率达到了前所未有的22-40微米。展示了该装置的制造、表征和阐明成核过程中的热传递方面的能力。
A novel microelectromechanical device has been developed to study the details of the heat transfer mechanisms involved at the nucleation site for the nucleate boiling process. This device enables quantifying the magnitude, time period of activation, and specific areas of influence of different mechanisms of heat transfer from the surface with a resolution several times greater than previously reported. This is achieved through the use of an array of embedded temperature sensors within a carefully designed dual-layer (silicon and benzocyclobutene) wall which allows for the accurate calculation of local heat flux, circumventing difficulties encountered when using existing methods. The sensors are radially distributed around the nucleation site. Heat is supplied to the wall by a thin film heater fabricated on the outer nonwetted surface. Single bubbles are generated at the center of the array while the temperatures and the bubble images are recorded with a sampling frequency of 8 kHz. The temperature data provided the necessary thermal boundary conditions to numerically calculate the surface heat flux with an unprecedented radial resolution of 22-40 mum. Fabrication, characterization, and the ability of the developed device to elucidate the heat transfer aspects of the nucleation process are demonstrated.