Raman spectroscopy study of DLC films prepared by RF plasma and filtered cathodic arc
Raman spectroscopy study of DLC films prepared by RF plasma and filtered cathodic arc
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DOI：
10.1016/j.surfcoat.2006.09.048
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发表时间：
2007-04
影响因子：
5.4
通讯作者：
P. Ha;D. Mckenzie;M. Bilek;S.C.H. Kwok;P. Chu;B. Tay
中科院分区：
文献类型：
--
作者：
P. Ha;D. Mckenzie;M. Bilek;S.C.H. Kwok;P. Chu;B. Tay
通过气相沉积沉积的碳薄膜中的内应力的积累可以是分层的主要原因。可以说，这个问题是碳气相沉积膜的工业开发迄今为止取得有限成功的主要原因之一。在本研究中，我们沉积的单层和多层薄膜的碳，并发现在一定的沉积条件下，我们能够产生薄膜无分层。采用射频等离子体和过滤阴极真空弧两种沉积系统，采用等离子体浸没离子注入和沉积（PIIID）技术制备了单层和多层类金刚石膜（DLC）。拉曼光谱揭示了先前确定为D和G带的结构中的峰的位移。用拉曼光谱表征了sp2和sp3的含量。
The build-up of intrinsic stress in carbon thin films deposited by vapour deposition can be a major cause of delamination. Arguably, this issue has been one of the main reasons why the industrial exploitation of carbon vapour deposited films has so far been of limited success. In the present study we deposited single and multilayer thin films of carbon and found that under certain deposition conditions, we were able to produce thin films free from delamination. Single and multilayer of films Diamond-like Carbon (DLC) were prepared by Plasma Immersion Ion Implantation and Deposition (PIIID) from two deposition systems: (1) Radio-Frequency (RF) plasma and (2) Filtered Cathodic Vacuum Arc (FCVA). Raman spectroscopy revealed a shift in the peaks previously identified as D and G band in the structures. The sp2and sp3ratio contents were characterized by Raman spectroscopy.