Structural studies and influence of the structure on the electrical and optical properties of microcrystalline silicon thin films produced by RF sputtering
Structural studies and influence of the structure on the electrical and optical properties of microcrystalline silicon thin films produced by RF sputtering
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DOI：
10.1016/s0040-6090(00)00950-0
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发表时间：
2000-07
期刊：
影响因子：
2.1
通讯作者：
M. Cerqueira;J. Ferreira;G. Adriaenssens
中科院分区：
文献类型：
--
作者：
M. Cerqueira;J. Ferreira;G. Adriaenssens
