A micro optical probe for edge contour evaluation of diamond cutting tools
A micro optical probe for edge contour evaluation of diamond cutting tools
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DOI：
10.5194/jsss-3-69-2014
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发表时间：
2014-03
影响因子：
1
通讯作者：
S. Jang;Y. Shimizu;S. Ito;W. Gao
中科院分区：
文献类型：
--
作者：
S. Jang;Y. Shimizu;S. Ito;W. Gao
抽象的。本文介绍了一种用于测量毫米级单点金刚石刀具刃口轮廓的微型光学测头。微型光学探针由波长为405 nm的激光源、数值孔径为0.25的物镜透镜、用于测量的光电二极管和包括用于补偿激光强度的另一光电二极管的补偿光学系统组成。由补偿光学系统中的分束器分割的准直激光束由物镜透镜聚焦，使得聚焦光斑可以用作微型光学探针。微型光学探针在物镜工具的边缘轮廓上跟踪，同时监测两个光电二极管的信号。用激光强度补偿光电二极管的输出来补偿测量光电二极管的输出，以消除激光不稳定性的影响。测量用光电二极管的信号被用来定义微光学探针直径内的边缘轮廓偏差。为了验证所研制的光学测头的可行性，将光学系统安装在金刚石车削机床上进行了实验。在该机器上测量了具有直切削刃和圆切削刃的两种类型的金刚石工具的刃形。
Abstract. This paper presents a micro optical probe, which is employed to evaluate edge contours of single point diamond tools with a size in a range of several millimetres. The micro optical probe consists of a laser source with a wavelength of 405 nm, an objective lens with a numerical aperture of 0.25, a photodiode for measurement, and a compensating optical system including another photodiode for compensation of laser intensity. A collimated laser beam, which is divided by a beam splitter in the compensating optical system, is focused by the objective lens so that the focused spot can be used as the micro optical probe. The micro optical probe traces over an edge contour of an objective tool while the signals of both the two photodiodes are monitored. The output of the photodiode for measurement is compensated by using that of the photodiode for laser intensity compensation to eliminate the influence of the laser instability. The signal of the photodiode for measurement is used to define the deviation of edge contour within the diameter of the micro optical probe. To verify the feasibility of the developed optical probe, the optical system was mounted on a diamond turning machine, and some experiments were carried out. Two types of edge contours of the diamond tools having a straight cutting edge and a round cutting edge were measured on the machine.