Isothermal differential dilatometry based on X-ray analysis applied to stress relaxation in thin ion-beam-sputtered Pt films
Isothermal differential dilatometry based on X-ray analysis applied to stress relaxation in thin ion-beam-sputtered Pt films
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DOI：
10.1007/s10853-016-0458-7
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发表时间：
2017-02
影响因子：
4.5
通讯作者：
W. Gruber;C. Baehtz;T. Geue;J. Stahn;H. Schmidt
中科院分区：
文献类型：
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作者：
W. Gruber;C. Baehtz;T. Geue;J. Stahn;H. Schmidt
研究了20 nm和40 nm离子束溅射Pt薄膜在等温退火过程中的应力松弛和点缺陷。首先，在130 ~ 400°C之间进行了基于x射线分析的等温微分膨胀测量。结果表明，压应力的松弛与表面空位的形成有关。根据测量结果，估计应力松弛过程的激活焓为0.14 eV。此外，利用stable194Pt示踪剂在同一类型薄膜上进行了Pt的自扩散实验。通过对退火时间较长的样品进行二次离子质谱分析，估计了铂在晶界扩散的激活焓为0.5 eV。讨论了表面空位产生、空位输运、非平衡体间隙湮灭和热生成空位对应力松弛的影响。
Relaxation of stress and point defects in ion-beam-sputtered Pt films with a thickness of 20 and 40 nm during isothermal annealing was investigated. First, isothermal differential dilatometry measurements based on X-ray analysis were carried out between 130 and 400 °C. They show that the relaxation of compressive stress is associated with the formation of vacancies at the surface. From the measurements, an activation enthalpy of 0.14 eV was estimated for the stress relaxation process. In addition, self-diffusion experiments of Pt were carried out on the same type of films using stable194Pt tracer. From secondary ion mass spectrometry on samples annealed for longer times, an activation enthalpy of 0.5 eV for Pt diffusion in grain boundaries was estimated. The influence of vacancy creation at the surface, vacancy transport, and the annihilation of non-equilibrium bulk interstitials and thermally created vacancies on stress relaxation is discussed.