Polymer micromachining for micro- and nanophotonics
Polymer micromachining for micro- and nanophotonics
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DOI：
10.1016/j.msec.2005.09.010
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发表时间：
2006-07-01
期刊：
影响因子：
--
通讯作者：
Rebigan, Roxana
中科院分区：
文献类型：
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作者：
Cristea, Dana;Obreja, Paula;Rebigan, Roxana
聚合物材料已被用于制造许多高性能。用于光通信、互连和传感器的低成本光子器件。本文介绍了两种低成本的聚合物基光子器件的制备方法，如光波导、衍射光学元件和光调制器，我们采用了可光致图案化的（金属掺杂的PVA）和不可光致图案化的（PMMA和有机硅）聚合物，通过添加无机/有机材料来改变聚乙烯醇的光敏性，同时改变其折射率。这种新型的光敏纳米复合材料可以很容易地旋涂到各种半导体衬底上，并直接图案化以获得通道波导和光子集成电路。对于不可图案化的聚合物，已经使用了两种类型的模具：在硅或二氧化硅中蚀刻的凹槽和光刻胶模具。脊形波导和可调谐调制器，电压驱动，已获得使用这些技术。(c)2005 Elsevier B. V.保留所有权利。
Polymeric materials have been used in the fabrication of many high-performance. low cost photonic devices for optical communications, interconnects and sensors. The paper presents two low cost techniques for polymer based photonic components fabrication, such as waveguides, diffractive optical elements and optical modulators.We used both photopatternable (metal doped PVA) and nonphotopatternable polymers (PMMA and silicone polymers).The photosensitivity and, in the same time, refractive index of the poly(vinyl-alcohol) were modified through the addition inorganic/organic materials. These new light-sensitive nanocomposites can be easily spin coated onto variety of semiconductor substrates, and directly patterned to obtain channel waveguides and photonic integrated circuits.For nonphotopatternable polymers, two types of molds have been used: grooves etched in silicon or in silicon dioxide and photoresist molds. Rib waveguides and tunable modulators, voltage actuated, have been obtained using these techniques. (c) 2005 Elsevier B.V. All rights reserved.