High-resolution nanotransfer printing applicable to diverse surfaces via interface-targeted adhesion switching

High-resolution nanotransfer printing applicable to diverse surfaces via interface-targeted adhesion switching
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DOI:
10.1038/ncomms6387
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发表时间:
2014-11-01
影响因子:
16.6
通讯作者:
Jung, Yeon Sik
Jung, Yeon Sik
中科院分区:
综合性期刊1区
文献类型:
--
作者:
Jeong, Jae Won;Yang, Se Ryeun;Jung, Yeon Sik

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纳米转移印刷技术在晶体管、超材料、表皮传感器和其他新兴器件的制造中提供了出色的简单性和吞吐量。然而,大面积亚50 nm纳米转移印刷工艺的发展受到高分辨率模板复制和生成的纳米结构释放中的基本可靠性问题的阻碍。在这里,我们提出了一种溶剂辅助的纳米转移印刷技术的基础上高保真复制的亚20纳米的图案,使用双功能双层聚合物薄膜。为了在不同的接收器表面上均匀和快速地释放纳米结构,通过采用聚二甲基硅氧烷凝胶垫作为溶剂发射转移介质来实现界面特异性粘附控制,即使在生物表面(例如人类皮肤和果皮)上也提供不寻常的印刷能力。基于这一原理,我们还展示了高密度金属纳米结构的可靠印刷,用于非破坏性和快速的表面增强拉曼光谱分析和具有优异响应性的氢检测传感器。
Nanotransfer printing technology offers outstanding simplicity and throughput in the fabrication of transistors, metamaterials, epidermal sensors and other emerging devices. Nevertheless, the development of a large-area sub-50 nm nanotransfer printing process has been hindered by fundamental reliability issues in the replication of high-resolution templates and in the release of generated nanostructures. Here we present a solvent-assisted nanotransfer printing technique based on high-fidelity replication of sub-20 nm patterns using a dual-functional bilayer polymer thin film. For uniform and fast release of nanostructures on diverse receiver surfaces, interface-specific adhesion control is realized by employing a polydimethylsiloxane gel pad as a solvent-emitting transfer medium, providing unusual printing capability even on biological surfaces such as human skin and fruit peels. Based on this principle, we also demonstrate reliable printing of high-density metallic nanostructures for non-destructive and rapid surface-enhanced Raman spectroscopy analyses and for hydrogen detection sensors with excellent responsiveness.