Self-assembly of block copolymers on lithographically patterned template with ordered posts
Self-assembly of block copolymers on lithographically patterned template with ordered posts
复制标题
嵌段共聚物在具有有序柱的光刻图案模板上的自组装
DOI：
10.1039/c5cp05449d
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发表时间：
2015
影响因子：
3.3
通讯作者：
Sun Yan-Bo
中科院分区：
文献类型：
--
作者：
Xu Dan;Liu Hong;Xue Yao-Hong;Sun Yan-Bo
采用耗散粒子动力学模拟来研究嵌段共聚物在用有序柱修改的模板上的自组装。研究了具有六边形排列和矩形排列的柱的模板。对于具有六角形排列柱的系统，最常见的是具有弯曲排列的形态。我们发现，在实验中可以直接观察到的不同种类的图案基本上是由底层的图案引起的。在用矩形排列的柱修改模板的模拟中，通过微调x和y方向上相邻柱之间的距离，可以获得底层和次底层之间具有不同角度的网状结构。这些结果揭示了通过模板定向自组装 BCP 来更好地设计 10 nm 尺度的光刻图案材料。
Dissipative particle dynamics simulations are employed to study the self-assembly of block copolymers on a template modified with ordered posts. Templates with hexagonally arranged and rectangularly arranged posts are both studied. For the systems with hexagonally arranged posts, morphologies with bending alignments are seen most often. We find that the different kinds of patterns, which can be directly observed in experiments, are substantially induced by the pattern of the bottom layer. In the simulations with a template modified with rectangularly arranged posts, by finely adjusting the distances between neighboring posts in both x and y directions, mesh-shaped structures with different angles between the bottom and the sub-bottom layers can be obtained. These results shed light on the better design of lithographically patterned materials on the scale of 10 nm via the directed self-assembly of BCPs by templating.