Development of (Pb,La)(Zr,Ti)O3 Electro-Optic Thin Film for High-Speed Spatial Light Modulator
Development of (Pb,La)(Zr,Ti)O3 Electro-Optic Thin Film for High-Speed Spatial Light Modulator
复制标题
用于高速空间光调制器的(Pb,La)(Zr,Ti)O3电光薄膜的研制
DOI：
10.1143/jjap.45.7520
复制
发表时间：
2006
影响因子：
1.5
通讯作者：
H. Takasu
中科院分区：
文献类型：
--
作者：
T. Fujii;Tatsuya Suzuki;Y. Fujimori;Takashi Nakamura;M. Moriwake;H. Takasu
利用电光薄膜(PLZT)制备了高速电光空间光调制器(EOSLM)。这种EOSLM具有纵向结构，因此在较低的驱动电压(<；20V)下需要较大的电光效应。我们研究了多晶PLZT的取向与电光效应的关系，发现(111)取向的PLZT具有很大的电光效应，其折射率变化超过0.025，电光常数为183pM/V。利用该PLZT薄膜制作了180×180像素阵列的空间光调制器(SLM)芯片原型。实验测得该器件的光开关速度为7 ns，是目前二维像素阵列器件的最高光开关速度。编码后的随机数据在原型芯片上得到了清晰的演示。
A high-speed electro-optic spatial light modulator (EOSLM) was successfully fabricated with (Pb,La)(Zr,Ti)O3 (PLZT) electro-optic thin film. This EOSLM has a longitudinal structure, so a large electro-optic effect is necessary for low driving voltage (<20 V). We have investigated the relationship between the orientation of polycrystalline PLZT and the electro-optic effect; we found that (111)-orientated PLZT has a large electro-optic effect, which shows a more than 0.025 refractive index change and a 183 pm/V electro-optic constant. With this PLZT film, we fabricated a prototype spatial light modulator (SLM) chip, which has 180×180 pixel arrays. The measured optical switching speed of this device was 7 ns, which is the highest switching speed for two-dimensional pixel array devices. Coded random data is clearly demonstrated with the prototype chip.