Volumetric microfabrication of helical structures for industrial applications
Volumetric microfabrication of helical structures for industrial applications
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DOI：
10.1117/12.2614703
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发表时间：
2022-05
期刊：
影响因子：
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通讯作者：
He Cheng;Pooria Golvari;Chun Xia;Mingman Sun;Meng Zhang;S. Kuebler;Xiaoming Yu
中科院分区：
文献类型：
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作者：
He Cheng;Pooria Golvari;Chun Xia;Mingman Sun;Meng Zhang;S. Kuebler;Xiaoming Yu
具有新颖光学和机械性能的螺旋结构已被证明并常用于超材料、微流体和细胞支架等不同领域。传统的制造方法都不具备以可调节距对大表面积进行图案化所需的吞吐量或灵活性。在本文中，我们报告了一种基于多光子聚合（MPP）的高通量体积制造具有可调谐形状的螺旋结构的新方法，该方法使用单曝光、具有可调节旋转强度分布的自加速光束。光场是基于高阶贝塞尔模式生成的，并导出了解析模型来描述光场的生成和传播。该方法用于在SU-8光刻胶中制备不同螺距和旋向的微螺旋。该系统可以实现分束和振镜扫描。演示了大规模螺旋矩阵的制造。与逐点扫描相比，我们的方法将制造吞吐量提高了几个数量级，为在许多工业应用中采用 MPP 大规模生产功能器件铺平了道路。
Helical structures with novel optical and mechanical properties have been demonstrated and are commonly used in different fields such as metamaterials, microfluidics and cell scaffold. None of conventional fabrication methods has the throughput or flexibility required for patterning large surface area with tunable pitch. In this paper, we report a novel method for high-throughput volumetric fabricating helical structures with tunable shape based on multiphoton polymerization (MPP) using single-exposure, self-accelerating beam with adjustable rotating intensity profile. The lightfields are generated based on high-order Bessel modes and an analytical model is derived to describe the generation and propagation of light-fields. The method is used to fabricated micro-helices with different pitches and handedness in SU-8 photoresist. Beam splitting and galvo-scanning can be implemented in the system. The fabrication of large-scale helical matrices is demonstrated. Compared to point-by-point scanning, our method increases the fabrication throughput by orders of magnitude, paving the way for adopting MPP for mass production of functional devices in many industrial applications.