Multifunctional oxide nanostructures by metal-organic chemical vapor deposition (MOCVD)
Multifunctional oxide nanostructures by metal-organic chemical vapor deposition (MOCVD)
复制标题
通过金属有机化学气相沉积（MOCVD）制备多功能氧化物纳米结构
DOI：
10.1351/pac-con-08-08-10
复制
发表时间：
2009
影响因子：
1.8
通讯作者：
C. Ternon
中科院分区：
文献类型：
--
作者：
F. Weiss;M. Audier;A. Bartasyte;D. Bellet;C. Girardot;C. Jiménez;J. Kreisel;S. Pignard;M. Salaun;C. Ternon
在电子系统尺寸不断缩小的背景下，薄膜的发展为多功能纳米结构的材料科学提出了具有挑战性的问题。这些包括缩小尺寸的限制，异构功能的集成，以及在原子尺度上的系统表征或过程控制。本文介绍了钙钛矿氧化物材料（或衍生结构材料）的不同研究，在晶体结构的特定方向上，原子组织减小到几纳米，从而构建纳米结构。在这些材料中，在多层或超晶格、纳米线（NWs）或纳米点中观察到非常原始的物理现象，主要是因为应变、表面和界面在这里起主导作用，并且可以调节物理性质。金属-有机化学气相沉积（MOCVD）路线已被用于氧化物材料的合成。我们首先介绍了MOCVD反应中金属-有机前驱体选择的基本规则。接下来，我们讨论了脉冲注入MOCVD系统的原理。一个激光辅助MOCVD系统，设计直接生长的二维和三维光子结构，也将被描述。最后将介绍一些案例研究，说明基于介电、铁电或超导氧化物、锰酸盐和镍酸盐的不同氧化物纳米结构的强大发展，以及与ZnO NWs生长有关的初步结果。
The development of thin films, in the context of ongoing reduction in the size of electronic systems, poses challenging questions for the materials sciences of multifunctional nanostructures. These include the limits of size reduction, integration of heterogeneous functions, and system characterization or process control at an atomic scale. We present here different studies devoted to perovskite oxide materials (or materials with derived structure), where in specific directions of the crystal structure the atomic organization decreases down to a few nanometers, thus building nanostructures. In these materials, very original physical phenomena are observed in multilayers or superlattices, nanowires (NWs) or nanodots, mainly because strain, surfaces, and interfaces play here a predominant role and can tune the physical properties. Metal-organic chemical vapor deposition (MOCVD) routes have been used for the synthesis of oxide materials. We first introduce the basic rules governing the choice of metal-organic precursors for the MOCVD reaction. Next we discuss the principles of the pulsed injection MOCVD system. A laser-assisted MOCVD system, designed to the direct growth of 2D and 3D photonic structures, will also be described. Selected case studies will finally be presented, illustrating the powerful development of different oxide nanostructures based on dielectric, ferroelectric, or superconducting oxides, manganites, and nickelates, as well as first results related to the growth of ZnO NWs.