Focused ion beam deposited carbon-platinum nanowires for cryogenic resistive thermometry
Focused ion beam deposited carbon-platinum nanowires for cryogenic resistive thermometry
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DOI：
10.1016/j.carbon.2020.06.087
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发表时间：
2020-11-01
期刊：
影响因子：
10.9
通讯作者：
Singh, Meenakshi
中科院分区：
文献类型：
--
作者：
Blagg, Kirsten;Allen, Portia;Singh, Meenakshi
在低温下研究经典和量子的热效应需要使用片上、局部、高灵敏度的测温技术。使用聚焦离子束（FIB）辅助沉积制造的碳-铂复合材料形成颗粒状结构，在这项研究中被证明是唯一适合于这种应用。使用24 pA离子束电流沉积的碳铂温度计具有低于1 K的高灵敏度，可与最好的低温温度计相媲美。此外，这些温度计可以使用无掩模工艺在芯片上精确放置到10纳米以内。它们还具有弱的磁场依赖性，在0至8 T的施加磁场下电阻变化< 3%。最后，由于FIB的广泛使用，这些温度计可集成到各种纳米级器件中。(C)2020爱思唯尔有限公司保留所有权利。
The study of thermal effects, both classical and quantum, at cryogenic temperatures requires the use of on-chip, local, high-sensitivity thermometry. Carbon-platinum composites fabricated using focused ion beam (FIB) assisted deposition form a granular structure which is shown in this study to be uniquely suited for this application. Carbon-platinum thermometers deposited using a 24 pA ion beam current have high sensitivities below 1 K, comparable to the best cryogenic thermometers. In addition, these thermometers can be accurately placed to within 10s of nanometers on the chip using a mask-free process. They also have a weak magnetic field dependence, < 3% change in resistance with applied magnetic fields from 0 to 8 T. Finally, these thermometers are integrable into a variety of nanoscale devices due to the existing wide spread use of FIB. (C) 2020 Elsevier Ltd. All rights reserved.