Fabrication of small diamond tips for scanning probe microscopy application
Fabrication of small diamond tips for scanning probe microscopy application
复制标题
DOI：
10.1063/1.118173
复制
发表时间：
1997-01
影响因子：
4
通讯作者：
E. Oesterschulze;W. Scholz;C. Mihalcea;D. Albert;B. Sobisch;W. Kulisch
中科院分区：
文献类型：
--
作者：
E. Oesterschulze;W. Scholz;C. Mihalcea;D. Albert;B. Sobisch;W. Kulisch
提出了一种在硅片上集成金刚石悬臂梁的制造工艺。在一端的杠杆拥有一个小曲率半径的尖端，从而使其在扫描探针显微镜应用中使用。各种程序的影响，以提高金刚石成核的性质的提示进行了研究。结果表明，采用1 μm金刚石浆料进行超声预处理，然后进行热灯丝化学气相沉积，可以获得最佳的结果。显微拉曼测量显示，尖端由无应力的金刚石组成，直到它们的顶点。
A process for the fabrication of diamond cantilevers integrated on a silicon wafer is presented. At one end the cantilevers possess a tip with a small radius of curvature thus allowing their use in scanning probe microscopy applications. The influence of various procedures to enhance diamond nucleation of the properties of the tips is investigated. Ultrasonic pretreatment with 1 μm diamond paste and subsequent hot-filament chemical-vapor deposition turned out to yield the best results. Micro-Raman measurements show the tips to consist of stress-free diamond up to their very apex.