Electrochemical Codeposition of Magnetic Particle-Ferromagnetic Matrix Composites for Magnetic MEMS Actuator Applications
Electrochemical Codeposition of Magnetic Particle-Ferromagnetic Matrix Composites for Magnetic MEMS Actuator Applications
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用于磁性 MEMS 致动器应用的磁性颗粒-铁磁基复合材料的电化学共沉积
DOI：
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发表时间：
2004
期刊：
影响因子：
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通讯作者：
Karl Vollmers
中科院分区：
文献类型：
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作者：
S. Guan;B. Nelson;Karl Vollmers
本文报道了一种用于微电子机械系统的新型电化学共沉积技术--MEMS！执行器应用程序。通过将硬磁性颗粒与电沉积的磁性材料结合起来，可以得到各种磁性复合材料，无论是软磁材料还是硬铁磁性材料！金属矩阵。所研究的掺杂磁粉为BaFe12O19，金属基质为电镀镍、CoNiMnP和化学镀镍磷合金。扫描电子显微镜结果表明，BaFe12O19粒子能够成功地包覆到所有所研究的金属基质中。结果表明，电化学共沉积技术制备的材料具有高达2120 Oe的高矫顽力(Hc)和高达8.0kJ/m3的最大磁能密度(BH)max。这
This paper reports on a new electrochemical codeposition technique for microelectromechanical systems ~MEMS! actuator application. Various magnetic composite materials can be obtained by incorporating hard magnetic particles with electrodeposited magnetic ~either soft or hard ferromagnetic materials! metal matrices. The incorporated magnetic particle investigated is barium ferrite (BaFe12O19), and the metal matrices are electroplated nickel, CoNiMnP, and an electroless plated nickel-phosphorus alloy. Scanning electron microscopy results show that BaFe12O19 particles can be successfully incorporated into all the investigated metal matrices. The resulting magnetic properties show that materials produced by the electrochemical codeposition technique have a high coercivity ( Hc) of up to 2120 Oe and a maximum magnetic energy density, (BH) max ,o f up to 8.0 KJ/m 3 . This