Preparation of pyrochlore Ca2Ti2O6 by metal-organic chemical vapor deposition
Preparation of pyrochlore Ca2Ti2O6 by metal-organic chemical vapor deposition
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DOI：
10.2320/matertrans.47.2603
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发表时间：
2006-10
影响因子：
1.2
通讯作者：
Mitsutaka Sato;R. Tu;T. Goto
中科院分区：
文献类型：
--
作者：
Mitsutaka Sato;R. Tu;T. Goto
Ca-Ti-O films were prepared by metal-organic chemical vapor deposition (MOCVD) using Ca(dpm) 2 and Ti(O-i-Pr) 2 (dpm) 2 precursors, and the effects of substrate temperature (T sub ) and Ca/Ti ratio (R Ca/Ti ) on the crystal structure and morphology were studied. Ca-Ti-O films consisting of pyrochlore Ca 2 Ti 2 O 6 and perovskite CaTiO 3 phase were obtained at T sub = 1073K and 0.35 < R Ca/Ti < 1. The content of pyrochlore Ca 2 Ti 2 O 6 increased with decreasing R Ca/Ti . Pyrochlore Ca 2 Ti 2 O 6 almost in a single phase was obtained at R Ca/Ti = 0.46. The morphology of pyrochlore Ca 2 Ti 2 O 6 was agglomerated fine grains about 50 nm in diameter having a columnar texture.
