Step Permeability and the Relaxation of Biperiodic Gratings on Si(001)
Step Permeability and the Relaxation of Biperiodic Gratings on Si(001)
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Si(001)上双周期光栅的阶跃磁导率和弛豫
DOI：
10.1103/physrevlett.78.3342
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发表时间：
1997
影响因子：
8.6
通讯作者：
J. Blakely
中科院分区：
文献类型：
--
作者：
So Tanaka;N. Bartelt;C. Umbach;R. Tromp;J. Blakely
我们用低能电子显微术研究了在Si（001）上制作的双周期光栅的原子高度岛和原子高度孔的时间依赖性。从这些岛和孔在光栅热平滑时成对消失，我们得出结论，Si（001）上的台阶是显著可渗透的，即，吸附原子可以跨越台阶而不被并入其中。岛面积的时间依赖性与模型计算的比较表明，吸附原子的掺入概率实际上是远远小于交叉概率。
We have used low energy electron microscopy to study the time dependence of atomic height islands and holes at the extrema of a fabricated biperiodic grating on Si(001). From the pairwise disappearance of these islands and holes as the grating thermally smooths we conclude that steps on Si(001) are remarkably permeable, i.e., adatoms can cross steps without becoming incorporated into them. Comparison of the time dependence of the island areas with model calculations shows that the adatom incorporation probability is actually much smaller than the crossing probability.