Microstructure Map for Self-Organized Phase Separation during Film Deposition
Microstructure Map for Self-Organized Phase Separation during Film Deposition
复制标题
薄膜沉积过程中自组织相分离的微观结构图
DOI：
10.1103/physrevlett.109.086101
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发表时间：
2012-08-20
影响因子：
8.6
通讯作者：
Wang, Yunzhi
中科院分区：
文献类型：
--
作者：
Lu, Yong;Wang, Cuiping;Wang, Yunzhi
合金外延膜具有多种不同的两相微结构，包括垂直和横向条纹的自组织纳米级浓度调制。为了了解这些微结构的差异，我们研究了它们的形成机制，通过在薄膜沉积过程中的调幅分解与计算机模拟的帮助。基于模拟结果，建立了一个微观结构图，描述了自组织两相微观结构的形态，初始合金成分和沉积速率相对于膜中的相分离动力学之间的关系。取决于相对于膜中的失稳分解动力学的沉积速率，可以获得横向和垂直调制的微结构。
Drastically different two-phase microstructures have been reported for alloy epitaxial films, including self-organized nanoscale concentration modulations of vertical and lateral stripes. To understand the disparity of these microstructures, we study their formation mechanisms via spinodal decomposition during film deposition with the aid of computer simulations. Based on the simulation results, a microstructure map is established that describes relationships among the morphology of self-organized two-phase microstructure, initial alloy composition, and deposition rate relative to the phase separation kinetics in the film. Depending on the deposition rate relative to the kinetics of spinodal decomposition in the film, both laterally and vertically modulated microstructures could be obtained.