Precise wide-range three-dimensional shape measurement method to measure superfine structures based on speckle interferometry
Precise wide-range three-dimensional shape measurement method to measure superfine structures based on speckle interferometry
复制标题
DOI：
10.1117/1.oe.59.1.014108
复制
发表时间：
2020-01-01
影响因子：
1.3
通讯作者：
Arai, Yasuhiko
中科院分区：
文献类型：
--
作者：
Arai, Yasuhiko
针对基于散斑干涉法的精细结构物体在物镜衍射极限以外的三维形状测量，讨论了散斑图和散斑图中各散斑区域的相位分布。实验结果证实，即使在散斑图的散斑区域，也存在与物体形状相关的相位分布。然而，用散斑干涉法测量超精细结构的结果表明，相位分布的空间连续性并不存在于每个散斑中，而是存在于散斑图中。利用这一特征，通过分析散斑干涉术中横向位移前后的散斑图，可以实现精细结构物体的大范围三维形状测量。此外，还证实了该方法可以实现非周期结构的形状测量。(C) 2020年中国光学仪器工程师学会(SPIE)
With regard to the three-dimensional (3D) shape measurement, based on speckle interferometry, of an object with a fine structure beyond the diffraction limit of the objective lens, phase distribution of each speckle region in a speckle pattern and a specklegram is discussed. The experimental results confirmed that the phase distribution with respect to the shape of an object exists spatially even in the speckle region of the speckle pattern. However, the measurement results of a superfine structure by speckle interferometry indicated that the spatial continuity of the phase distribution does not exist in each speckle but in the specklegram. This feature was used to confirm that a wide range of 3D shape measurements of an object with a fine structure can be realized by analyzing specklegrams calculated from speckle patterns before and after a lateral shift in speckle interferometry. Furthermore, it is confirmed that the shape measurement of a nonperiodical structure can be performed. (C) 2020 Society of Photo-Optical Instrumentation Engineers (SPIE)