Real-time in situ monitoring of wet thermal oxidation for precise confinement in VCSELs
Real-time in situ monitoring of wet thermal oxidation for precise confinement in VCSELs
复制标题
实时原位监测湿热氧化，以实现 VCSEL 中的精确限制
DOI：
10.1088/0268-1242/23/10/105021
复制
发表时间：
2008
影响因子：
1.9
通讯作者：
C. Fontaine
中科院分区：
文献类型：
--
作者：
G. Almuneau;R. Bossuyt;P. Collière;L. Bouscayrol;M. Condé;I. Suárez;V. Bardinal;C. Fontaine
提出了一种新的成像方法，使横向湿热氧化的垂直腔激光器（VCSEL）结构中嵌入的薄铝层的监测。该方法基于对孔径层折射率变化所固有的VCSEL反射率光谱的修改的测量，其中观察窗口被限制到该反射率变化最大的波长范围。其主要目的是精确控制埋入的限制孔径，从而精确控制激光器件的电光特性。横向氧化的动力学已经研究了小尺寸孔径VCSEL（3-10 μm）和长范围氧化深度。这种基于光学成像系统的简单方法将能够稳健地提高这种多因素依赖的技术过程的生产产量。
A new imaging method is presented enabling the monitoring of the lateral wet thermal oxidation of a thin Al-containing layer embedded in a vertical cavity lasers (VCSEL) structure. This method is based on the measurement of the modification of the VCSEL reflectivity spectrum inherent to the aperture layer refractive index change, with an observation window restricted to the wavelength ranges for which this reflectivity variation is maximal. The main purpose is the accurate control of the buried confinement aperture, and, thereby, that of the electro-optical characteristics of the laser device. The kinetics of the lateral oxidation has been studied for small-size aperture VCSEL (3–10 µm) and for long-range oxidation depths. This straightforward method based on an optical imaging system will enable robust improvement of the production yield of this multifactor-dependent technological process.