Asymmetric Quad Leg Orthoplanar Spring for Wideband Piezoelectric Micro Energy Harvesting
Asymmetric Quad Leg Orthoplanar Spring for Wideband Piezoelectric Micro Energy Harvesting
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DOI：
10.1109/mems49605.2023.10052512
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发表时间：
2023-01
期刊：
影响因子：
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通讯作者：
Ali Mohammadi;Shamin Sadrafshari;A. Shokrani;C. Bowen
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文献类型：
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作者：
Ali Mohammadi;Shamin Sadrafshari;A. Shokrani;C. Bowen
压电能量采集器（EH）在换能器装置的谐振频率处产生其最高能量水平。为了提供宽带EH解决方案，可以使用具有多个谐振模式的非线性机械谐振器。我们提出了一种新的非对称四脚正交平面弹簧（QOPS）EH微结构，以增加收获带宽。所提出的设计是在CMOS兼容的微加工工艺。有限元分析表明，与对称设计相比，非对称设计的带宽最多增加了27%。为了测量电输出，在同一微芯片上实现的一个对称和三个非对称压电器件暴露于宽频带上的机械振动。实验结果证实了增加的频率带宽的谐振器引入的不对称添加到弹簧，相比对称配置。
Piezoelectric energy harvesters (EH) generate their highest energy levels at the resonant frequencies of the transducer devices. To provide a wide-band EH solution, nonlinear mechanical resonators with multiple resonant modes can be used. We present a new asymmetric quad-leg orthoplanar spring (QOPS) EH microstructure to increase the harvesting bandwidth. The proposed design is implemented in CMOS compatible microfabrication processes. Finite element analysis show that the asymmetric designs increases the bandwidth by maximum 27% compared with symmetric designs. In order to measure the electrical output, one symmetric and three asymmetric piezoelectric devices implemented on the same microchip are exposed to mechanical vibrations over a wide frequency bandwidth. Experimental results approve the increase in the frequency bandwidth of resonators introduced by asymmetries added to the spring, as compared to the symmetrical configuration.