Transmission electron microscopy studies of microstructural evolution, defect structure, and phase transitions in polycrystalline and epitaxial Ti1-xAlxN and TiN films grown by reactive magnetron sputter deposition
Transmission electron microscopy studies of microstructural evolution, defect structure, and phase transitions in polycrystalline and epitaxial Ti1-xAlxN and TiN films grown by reactive magnetron sputter deposition
复制标题
DOI：
10.1016/0040-6090(91)90297-b
复制
发表时间：
1991-12
期刊：
影响因子：
2.1
通讯作者：
L. Hultman;G. Håkansson;U. Wahlström;J. Sundgren;I. Petrov;F. Adibi;J. Greene
中科院分区：
文献类型：
--
作者：
L. Hultman;G. Håkansson;U. Wahlström;J. Sundgren;I. Petrov;F. Adibi;J. Greene
