Secondary Ion Mass Spectrometry: Applications for Depth Profiling and Surface Characterization
Secondary Ion Mass Spectrometry: Applications for Depth Profiling and Surface Characterization
复制标题
二次离子质谱：深度分析和表面表征的应用
DOI：
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发表时间：
2016
期刊：
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通讯作者：
F. Stevie
中科院分区：
文献类型：
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作者：
F. Stevie
二次离子质谱（西姆斯）是一种用于固体材料的质谱技术，可以提供百万分之一灵敏度和50 nm横向分辨率的元素分析。当这些能力与提供作为深度函数的分析的能力相结合时，西姆斯已被证明是一种适用于广泛应用的有价值的技术。这本书是为了解释一种需要理解许多细节才能正确获得和解释数据的技术而写的。它也将作为那些需要提供西姆斯数据的人的参考。这本书有超过200个数字和参考资料，让一个跟踪的西姆斯和帮助理解的技术。
Secondary ion mass spectrometry (SIMS) is a mass spectrometric technique for solid materials that can provide elemental analysis at parts per million sensitivity and lateral resolution of 50 nm. When those capabilities are combined with the ability to provide that analysis as a function of depth, SIMS has proved to be a valued technique for a wide range of applications. This book was written to explain a technique that requires an understanding of many details in order to properly obtain and interpret the data. It also will serve as a reference for those who need to provide SIMS data. The book has over 200 figures and the references allow one to trace the development of SIMS and help understand the technique.