Photocatalytic and photoelectrochemical properties of TiO2-based multiple layer thin film prepared by sol-gel and reactive-sputtering methods
Photocatalytic and photoelectrochemical properties of TiO2-based multiple layer thin film prepared by sol-gel and reactive-sputtering methods
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DOI：
10.1039/b100216n
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发表时间：
2001
影响因子：
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通讯作者：
A. Yasumori;H. Shinoda;Y. Kameshima;S. Hayashi;K. Okada
中科院分区：
文献类型：
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作者：
A. Yasumori;H. Shinoda;Y. Kameshima;S. Hayashi;K. Okada
在以前的研究中，通过溶胶-凝胶法制备了由TiO 2薄膜、铂电极和多孔氧化铝基底组成的多层TiO 2薄膜。由于溅射法相对于湿化学法具有一定的优势，特别是在实际生产中，本研究采用反应溅射法制备了具有相同层状结构的薄膜光催化剂。通过使用适当的气体压力和温度形成的光活性的TiO 2薄膜的α相，然而，α相的晶粒尺寸几乎是两倍大，带隙能量是略小于那些溶胶-凝胶处理的薄膜。经退火处理的薄膜呈现出典型的柱状结构，并伴有一些空洞。较低的带隙能量和粗糙的结构可能促进了光激发电子和空穴之间的复合，并导致较低的光催化活性和光电流相比，溶胶-凝胶处理的薄膜。
The multiple layers of a TiO2 thin film, consisting of a TiO2 thin film, a platinum electrode and a porous alumina substrate, were prepared by the sol–gel method in a previous study. As a sputtering process has some advantages over wet-chemical processes, especially for practical manufacturing, a thin film photocatalyst with the same layer structure was prepared by the reactive-sputtering method in this study. The TiO2 thin film of the photoactive anatase phase was formed by using an appropriate gas pressure and temperature, however, the crystallite size of anatase was almost twice as large and the band gap energy was slightly smaller than those of the sol–gel-processed thin film. The sputtering-processed thin film showed a typical columnar structure with some voids. The lower band gap energy and the coarse structure probably promoted the recombination between photoexcited electrons and holes, and resulted in lower photocatalytic activity and photocurrent compared with the sol–gel-processed thin film.